Synthesis of nanostructured photoactive films with controlled morphology by a flame aerosol reactor

ABSTRACT

An improved process for the preparation of nanostructured metal species-based films in a flame aerosol reactor is provided. The process comprises combusting vaporized metal precursor, vaporized fuel and vaporized oxidizer streams to form metal species-based nanoparticles in a flame that are deposited onto a temperature controlled support surface and sintered to form the metal species-based nanostructured film. Improved nanostructured photo-watersplitting cells having a sunlight to hydrogen conversion efficiency of from about 10% to about 15%, dye sensitized solar cells having a sunlight to electricity conversion efficiency of from about 10% to about 20%, and nanostructured p/n junction solar cells having a sunlight to electricity conversion of from about 10% to about 20% are provided. Each cell type comprises a nanostructured metal oxide film having continuous individual columnar structures having an average width (w) and grain size criterion (X 3 ) wherein w/10 is greater than X 3 .

FIELD OF THE INVENTION

The present invention generally relates to a single step process for thepreparation of photoactive films using a flame aerosol reactor. Thepresent invention also generally relates to films having morphologyresulting in high solar conversion efficiencies.

BACKGROUND OF THE INVENTION

In recent years, solar cells for the conversion of photons into electricenergy have drawn attention as an alternative energy source in responseto concerns about environmental problems and energy depletion associatedwith fossil fuels.

One of the major obstacles to widespread harvesting of solar energy isthe high production cost of silicon-based solar cells. Low costalternatives include dye-sensitized solar (“DSS”) cells andphotocatalytic watersplitting (“PWS”) cells. Both types of cells use aphotoelectrical process comprising a photocatalyst, typicallyimmobilized as a film, to covert solar energy into a more usable form.DSS cells generate an electric current and PWS cells generate hydrogengas.

Photovoltaic film fabrication has been an active area of research forseveral decades and a number of methods have been developed. Twomethods, chemical vapor deposition (“CVD”) and combustion chemical vapordeposition (“CCVD”), produce vaporized metal species that condense on asubstrate to form nanoparticles. Problematically, CVD and CCVD generallyinvolve multi-step processes, such as deposition followed by sintering,that can take from several hours to days to complete, and metal speciesparticle size and nanostructured morphology are difficult to control.Those methods are not well suited to the inexpensive industrial scaleupthat would be required for widespread implementation.

A need exists for low cost methods for the preparation of nanostructuredfilms having high surface area and having tailored morphologicalcharacteristics suitable for applications in catalytic reactors andphotovoltaic films.

SUMMARY OF THE INVENTION

Among the various aspects of the present invention is the provision ofan improved process for the preparation of metal species-basednanostructured films in a flame aerosol reactor, improved nanostructuredphoto-watersplitting cells, improved dye sensitized solar cells andimproved nanostructured p/n junction solar cells.

Briefly, therefore one aspect of the present invention is a process forthe preparation of a metal species-based nanostructured film in a flameaerosol reactor. The method comprises introducing a vaporized metalprecursor stream, a vaporized fuel stream and a vaporized oxidizerstream and combusting the streams in a flame to form metal species-basednanoparticles in the flame region. The metal species-based nanoparticlesare deposited onto a support surface wherein the temperature of thesurface is controlled. The metal species-based nanoparticles aresintered to form the metal species-based nanostructured film.

The present invention is further directed to a process for thepreparation of a metal species-based nanostructured film in a flameaerosol reactor. The method comprises introducing a vaporized metalprecursor stream and a vaporized fuel stream into the reactor andcombusting the streams in a flame to form in the flame region metalspecies-based nanoparticles comprising zero valent metal. The metalspecies-based nanoparticles are deposited onto a support surface whereinthe temperature of the surface is controlled. The metal species-basednanoparticles are sintered to form the metal species-basednanostructured film.

The present invention is further directed to a nanostructuredphoto-watersplitting cell for the production of hydrogen. The cellcomprises a photoanode comprising a support and a nanostructured metaloxide film disposed on at least one surface of the support. The filmpredominantly comprises a columnar morphology characterized as havingcontinuous individual columnar structures oriented approximately normalto the support wherein the columnar structures have an average width, w,and a grain size criterion, X_(s), and wherein w/10 is greater thanX_(s). The cell further comprises a counter electrode. Thenanostructured photo-water splitting cell has a sunlight to hydrogenconversion efficiency of from about 10% to about 15%.

The present invention is further directed to a nanostructureddye-sensitized solar cell comprising an electron conducting layercomprising a support and a nanostructured metal oxide film disposed onat least one surface of the support. The film predominantly comprises acolumnar morphology characterized as having continuous individualcolumnar structures oriented approximately normal to the support whereinthe columnar structures have an average width, w, and a grain sizecriterion, X_(s), and wherein w/10 is greater than Xs. The cell furthercomprises a light absorbing layer and a hole-conducting layer. Thenanostructured dye-sensitized solar cell has a sunlight to electricityconversion efficiency of from about 10% to about 20%.

The present invention is further directed to a nanostructured p/njunction solar cell comprising an n-type oxide semiconductor layercomprising a support and a nanostructured metal oxide film disposed onat least one surface of the support, the film predominantly comprising acolumnar morphology characterized as having continuous individualcolumnar structures oriented approximately normal to the support whereinthe columnar structures have an average width, w, and a grain sizecriterion, X_(s), and wherein w/10 is greater than Xs. The cell furthercomprises a p-type oxide semiconductor layer comprising a support and ananostructured metal oxide film disposed on at least one surface of thesupport, the film predominantly comprising a columnar morphologycharacterized as having continuous individual columnar structuresoriented approximately normal to the support wherein the columnarstructures have an average width, w, and a grain size criterion, X_(s),and wherein w/10 is greater than Xs. The nanostructured p/n junctionsolar cell has a sunlight to electricity conversion of from about 10% toabout 20%.

Other objects and features will be in part apparent and in part pointedout hereinafter.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic illustration of a flame aerosol reactor of thepresent invention.

FIG. 2 is a scanning electron micrograph of a titanium dioxide filmhaving a sintered column morphology and an illustration of typicalcolumns where “w” is column width and “h” is column height.

FIG. 3 is an illustration of grain size and a transmission electronmicroscopy image indicating the measurement of the grain size of atitanium dioxide particle of the present invention.

FIG. 4 depicts films prepared by the flame aerosol reactor of thepresent invention where FIG. 4A is a schematic illustration of columnarmorphology formation on high temperature glass substrate, FIG. 4B is ascanning electron micrograph image of a side view of titanium dioxidefilms having columnar morphology, FIG. 4C is a scanning electronmicrograph image of a highly crystalline titanium dioxide single columnand FIG. 4D is a transmission electron microscopy image for columnartitanium dioxide showing diffraction from the [103] and [101] planes ofanatase.

FIG. 5 is a scanning electron micrograph of a side view of a titaniumdioxide film of the present invention having columnar morphology.

FIG. 6 is a scanning electron micrograph of a side view of a titaniumdioxide film of the present invention having columnar morphology.

FIG. 7 is a scanning electron micrograph of a side view of a titaniumdioxide film of the present invention having columnar morphology.

FIG. 8 is a scanning electron micrograph of a side view of a titaniumdioxide film of the present invention having columnar morphology.

FIG. 9 depicts films prepared by the flame aerosol reactor of thepresent invention where FIG. 9A is a schematic illustration of granularmorphology formation on low temperature glass substrate, FIG. 9B is ascanning electron micrograph of a side view of titanium dioxide filmshaving granular morphology, FIG. 9C is a transmission electronmicroscopy image of a granular titanium dioxide fractal and FIG. 9D isan image of titanium dioxide polycrystalline electron diffraction ringscorresponding to the [101], [004], [200], [105] and [205] reflections ofanatase, moving from the center of the ring outwards.

FIG. 10 is a scanning electron micrograph of a side view of a titaniumdioxide film of the present invention having granular morphology.

FIG. 11 is a scanning electron micrograph of a side view of a titaniumdioxide film of the present invention having granular morphology.

FIG. 12 is a scanning electron micrograph of a side view of a titaniumdioxide film of the present invention having granular morphology.

FIG. 13 is a scanning electron micrograph of a side view of a titaniumdioxide film of the present invention having granular morphology.

FIG. 14 is a schematic illustration of nanoparticle aerosol dynamics ina flame aerosol reaction for titanium isopropoxide metal precursor wheret_(rxn) is the characteristic reaction time for the reaction of theprecursor, t_(res) is the nanoparticle residence time in the flame,t_(col) is the particle-particle characteristic collision time andt_(sin) is the particle sintering time, CVD is chemical vapordeposition, IPD is individual particle deposition and APD is aggregateparticle deposition.

FIG. 15 depicts a transmission electron microscopy image and particlesize distributions where FIG. 15A is a transmission electron microscopyimage of titanium dioxide particles in a flame aerosol reactor of thepresent invention having an aerosol phase prepared at a titaniumisopropoxide metal precursor feed rate of 0.069 millimols per hour, FIG.15B is an illustration of the titanium dioxide particle sizedistribution from transmission electron microscopy images, and FIG. 15Cis a titanium dioxide aerosol phase particle size distribution measuredby scanning mobility particle spectrometry (SMPS). D_(p) refers to theaverage particle size.

FIG. 16 depicts a transmission electron microscopy image and particlesize distributions where FIG. 16A is a transmission electron microscopyimage of titanium dioxide particles in a flame aerosol reactor of thepresent invention aerosol phase prepared at a titanium isopropoxidemetal precursor feed rate of 0.55 millimols per hour, FIG. 16B is anillustration of the titanium dioxide particle size distribution fromtransmission electron microscopy images, and FIG. 16C is a titaniumdioxide aerosol phase particle size distribution measured by scanningmobility particle spectrometry (SMPS). D_(p) refers to the averageparticle size.

FIG. 17 depicts scanning electron micrograph side view images where FIG.17A is a scanning electron micrograph side view image of titaniumdioxide prepared in a flame aerosol reactor of the present invention ata titanium isopropoxide metal precursor feed rate of 0.069 millimols perhour for 180 seconds and imaged at high resolution and FIG. 17B is ascanning electron micrograph side view image of titanium dioxideprepared at an titanium isopropoxide metal precursor feed rate of 0.55millimols per hour for 180 seconds and imaged at low resolution (b1) andat an isopropoxide metal precursor feed rate of 0.55 millimols per hourfor 180 seconds and imaged at high resolution (b2).

FIG. 18 is an illustration of titanium dioxide film grain size in nmversus titanium isopropoxide metal precursor feed rate for a fixed feedtime of 180 seconds. The point labeled 4 a corresponds to the filmdepicted in FIG. 17( a) and the point labeled 4 b corresponds to thefilm depicted in FIGS. 17( b 1) and (b 2).

FIG. 19 are scanning electron micrograph side view images of titaniumdioxide films of the present invention prepared in a flame aerosolreactor at a titanium isopropoxide metal precursor feed rate of 0.14millimols per hour for 120 seconds (FIG. 19A), 240 seconds (FIG. 19B),and 960 seconds (FIG. 19C).

FIG. 20 is an illustration of titanium dioxide film thickness in nmversus deposition time for titanium isopropoxide metal precursor feedrates 0.069 millimols per hour, 0.14 millimols per hour, and 0.27millimols per hour. The point labeled 6 a corresponds to the filmdepicted in FIG. 19( a) (0.14 millimols per hour titanium isopropoxidemetal precursor for 120 seconds); the point labeled 6 b corresponds tothe film depicted in FIG. 19( b) (0.14 millimols per hour titaniumisopropoxide metal precursor for 240 seconds); and the point labeled 6 ccorresponds to the film depicted in FIG. 19( c) (0.14 millimols per hourtitanium isopropoxide metal precursor for 960 seconds).

FIG. 21 is an illustration of photocurrent in nanoamperes for titaniumdioxide films of the present invention prepared in a flame aerosolreactor for various titanium isopropoxide metal precursor feed rates ata fixed feed time of 180 seconds.

FIG. 22 is an illustration of photocurrent in nanoamperes for titaniumdioxide films of the present invention having various film thicknessesin nm that were prepared in a flame aerosol reactor at a titaniumisopropoxide metal precursor feed rate of 0.15 millimols per hour.

FIG. 23 is a schematic illustration of a second embodiment of a flameaerosol reactor of the present invention.

FIG. 24 is a schematic illustration of watersplitting performance inmA/cm² for various film thicknesses for columnar morphology films of thepresent invention wherein titanium dioxide was deposited onto asubstrate at a burner to substrate distance of 1.7 cm.

FIG. 25 is an illustration of watersplitting performance in mA/cm² forvarious film thicknesses for granular morphology films of the presentinvention wherein titanium dioxide was deposited onto a substrate at aburner to substrate distance of 4.1 cm.

FIG. 26 is an illustration of photocurrent performance in mA/cm² forvarious film thicknesses for columnar morphology films of the presentinvention wherein titanium dioxide was deposited onto a substrate at aburner to substrate distance of 1.7 cm.

FIG. 27 is an illustration of photocurrent performance in mA/cm² forvarious film thicknesses for granular morphology films of the presentinvention wherein titanium dioxide was deposited onto a substrate at aburner to substrate distance of 4.1 cm.

FIG. 28 is a schematic illustration of a photo-watersplitting cell ofthe present invention.

FIG. 29 is a schematic illustration of a dye sensitized solar cell ofthe present invention.

FIG. 30 is a schematic illustration of a p/n junction oxide solar cellof the present invention.

Corresponding reference characters indicate corresponding partsthroughout the drawings.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

The present invention is directed to a controlled, single step, flameaerosol reaction process for the preparation of photovoltaic filmscomprising a photocatalyst. The present invention is further directed tophotovoltaic films having high efficiency for the conversion by thephotocatalyst of ultraviolet (“UV”) light into electrical current andhydrogen by watersplitting.

In accordance with the present invention, it has been discovered thatgaseous metal precursor, fuel and an oxidizer can be combusted in aflame aerosol reactor to generate metal species-based nanoparticles inan aerosol phase in the flame region, the nanoparticles then beingdeposited onto a temperature controlled substrate via thermophoresis toyield nanoparticle films of desired morphology. The present mechanism isdifferent from CVD and CCVD processes known in the art wherenanoparticles instead form on the substrate from a vapor phase. It hasfurther been discovered that the size of the particles as they arrive atthe substrate can be controlled by varying the metal precursor feedrate. It has still further been discovered that substrate temperaturecan control the nanoparticle sintering rate and the resultant crystalphase of the film. Nanoparticle deposition and sintering can be donesimultaneously thereby providing a single step film fabrication process.

In accordance with the present invention, it has been further discoveredthat the nanoparticles of the present invention can be used in thepreparation of nanostructured photo-water splitting cells for theproduction of hydrogen, the cells having a sunlight to hydrogenconversion efficiency of from about 10% to about 15%; in the preparationof nanostructured dye-sensitized solar cells having a sunlight toelectricity conversion efficiency of from about 10% to about 20%; and inthe preparation of nanostructured p/n junction solar cells having asunlight to electricity conversion efficiency of from about 10% to about20%.

Flame aerosol reactors (“FLAR”) in combination with a cooled substrateis an effective way to synthesize metal species-based nanostructuredfilms in single-step processes that allow rapid processing. Through thecontrol of process variables such as, for example, formed nanoparticleparticle size and substrate temperature, FLAR can be used to tailor filmarchitecture and morphology to meet the needs of specific applications.The controlled morphology of nanoparticle films produced in the FLAR cangenerally take on two forms, granular and columnar.

FIG. 1 illustrates an example of one FLAR embodiment of the presentinvention. The FLAR comprises a metal precursor feed line 3 forsupplying a metal precursor stream 2 from a source 1 to the burner 15, afuel feed line 7 for supplying a fuel stream 6 from a source 5 to theburner 15 and an oxidizer feed line 12 for supplying an oxidizer stream11 from a source 10 to the burner 15. Vaporized fuel and vaporizedoxidizer are combusted in the burner 15 to form a flame 20 in thecombustion zone 30 located between the distal end of the burner 17 andthe exposed surface 37 of the substrate 35. One surface 39 of thesubstrate 35 is in direct or indirect contact with a surface 41 ofcooled heat sink 40 for control of the temperature of substrate surface37. Metal species-based nanoparticles 25 form in the combustion zone 30and are deposited as a film 38 on substrate surface 37. In someembodiments, one or more thermal resistance devices 42 can be insertedbetween substrate surface 39 and cooled heat sink surface 41.

In some embodiments, burner 15 can comprise one or a plurality (notdepicted) of metal precursor feed lines 3, fuel feed lines 7 and/oroxidizer feed lines 12. In other embodiments, the fuel 6 and oxidizer 11can be optionally admixed and introduced to burner 15 as an admixturethrough one or a plurality of feed lines (not depicted). In otherembodiments, the metal precursor 2 and fuel 6 can be optionally admixedand introduced to burner 15 as an admixture through one or a pluralityof feed lines (not depicted). In other embodiments, the metal precursor2 and oxidizer 11 can be optionally admixed and introduced to burner 15as an admixture through one or a plurality of feed lines (not depicted).In other embodiments, the metal precursor 2, fuel 6 and oxidizer 11 canbe optionally admixed and introduced to burner 15 as an admixturethrough one or a plurality of feed lines (not depicted). In yet otherembodiments (not depicted), an inert gas can be added to the metalprecursor stream 2 as a carrier or dilution gas, to the fuel stream 6 asa carrier or dilution gas, to the oxidizer stream 11 as a carrier ordilution gas, and/or to the burner 15 as a dilution gas. In still otherembodiments (not depicted), a flow control device, such as a controlvalve, can be place in the metal precursor feed line(s) 3, fuel feedline(s) 7 and/or oxidizer feed line(s) 12 to regulate the flow of themetal precursor stream(s) 2, the fuel stream(s) 6 and/or oxidizerstream(s) 11 to the burner 15.

Preferred metal precursors include essentially any metal compound thatcan be volatilized and oxidized, nitrided, hydrolyzed, or otherwisereacted in a high temperature flame environment. Examples of volatilemetal compounds non-exclusively include metal alkyls, metal olefincomplexes, metal hydrides, metal halides, metal alkoxides, metal oxides,metal formates, acetates, oxalates, and esters generally, metalglycolates, metal glycolato alkoxides, complexes of metals withhydroxyalkyl amines, etc. Examples of typical metal precursors includetitanium isopropoxide (“TTIP”), ferrocene and iron pentacarbonyl. Allsuch compounds useful in the present process are termed “metalprecursors.” Volatile metal compounds are defined as solid or liquidcompounds capable of passing into the vapor state at a temperaturewithin the scope of the present invention. In some embodiments, thevolatile metal compounds are heated and pass into a carrier gas streamfor delivery to the burner. The carrier gas can be an inert gas, a fuelgas (described below), an oxidizer gas (described below) or combinationsthereof. Heat can be supplied to the volatile metal compounds indirectlysuch as by heating the container in which it is stored or by heating arecirculating slip stream, or directly such as by heating the carriergas and passing it over or bubbling it through the volatile metalcompound.

Preferred metals are those of the main groups 3 to 5 of the periodictable of the elements, the transition metals, and the “inner transitionmetals,” i.e. lanthanides and actinides. “Metals” as used hereinincludes those commonly referred to as semi-metals, including but notlimited to boron, germanium, silicon, arsenic, tellurium, etc. Metals ofGroups 1 and 2 may also be used, generally in conjunction with a furthermetal from one of the aforementioned groups. Non-metal compounds such asthose of phosphorous may also be used when a metal is used, e.g. toprepare mixed oxides or as dopants. In many cases, a predominant metalcompound such as a tin or silicon compound is used, in conjunction withless than about 10 mol percent of another metal, such as a transition orinner-transition metal, to provide doped particles with unusual optical,magnetic, or electrical properties. Some preferred metals includesilicon, titanium, zirconium, aluminum, gold, silver, platinum and tin.

Metal species-based nanoparticles generated in the FLAR from metalprecursor compounds may be a zero valent metal, an oxide or hydroxidethereof, a carbide, boride, phosphide, nitride or other species, ormixture thereof. Preferred metal species are zero valent metals, metaloxides, or metal nitrides, more preferably zero valent metals and/ormetal oxides. Representative metal compounds useful as photocatalysts ofthe present invention include anatase, rutile or amorphous metal oxidessuch as titanium dioxide (TiO₂), zinc oxide (ZnO), tungsten trioxide(WO₃), ruthenium dioxide (RuO₂), silicon oxide (SiO), silicon dioxide(SiO₂), iridium dioxide (IrO₂), tin dioxide (SnO₂), strontium titanate(SrTiO₃), barium titanate (BaTiO₃), tantalum oxide (Ta₂O₅), calciumtitanate (CaTiO₃), iron (III) oxide (Fe₂O₃), molybdenum trioxide (MoO₃),niobium pentoxide (NbO₅), indium trioxide (In₂O₃), cadmium oxide (CdO),hafnium oxide (HfO₂), zirconium oxide (ZrO₂), manganese dioxide (MnO₂),copper oxide (Cu₂O), vanadium pentoxide (V₂O₅), chromium trioxide(CrO₃), yttrium trioxide (YO₃), silver oxide (Ag₂O), or Ti_(x)Zr_(1-x)O₂wherein x is between 0 and 1; metal sulfides such as cadmium sulfide(CdS), zinc sulfide (ZnS), indium sulfide (In₂S₃), copper sulfide(Cu₂S), tungsten disulfide (WS₂), bismuth trisulfide (BiS₃), or zinccadmium disulfide (ZnCdS₂); metal chalcogenites such as zinc selenide(ZnSe), cadmium selenide (CdSe), indium selenide (In₂Se₃), tungstenselenide (WSe₃), or cadmium telluride (CdTe); metal nitrides such assilicon nitride (SiN, Si₃N₄) and gallium nitride (GaN); metal phosphidessuch as indium phosphide (InP); metal arsenides such as gallium arsenide(GaAs); semiconductors such as silicon (Si), silicon carbide (SiC),diamond, germanium (Ge), germanium dioxide (GeO₂) and germaniumtelluride (GeTe); photoactive homopolyanions such as W₁₀O₃₂ ⁻⁴;photoactive heteropolyions such as XM₁₂O₄₀ ^(−n) or X₂M₁₈O₆₂ ⁻⁷ whereinx is Bi, Si, Ge, P or As, M is Mo or W, and n is an integer from 1 to12; polymeric semiconductors such as polyacetylene; and mixturesthereof. Transition metal oxides such as titanium dioxide and zinc oxideare preferred because they are chemically stable, non-toxic, inexpensiveand exhibit high photocatalytic activity.

The fuel is any material which can be vaporized and oxidized under theflame conditions. Fuels include, without limitation, hydrogen;hydrocarbons such as methane, ethane, ethene, propane, propene andacetylene; hydrocarbonoxy compounds such as lower alcohols, ketones,etc.; and sodium. Combinations of gases, particularly combinations ofhydrogen and lower alkanes may be useful in many applications. Sodium isuseful when films comprising non-oxidized metal species-basednanoparticles (e.g., zero valent metals) are required. A molar excess offuel gas to metal precursor compound is preferred, for example a molarratio range of about 100:1 to about 100,000:1, about 1000:1 to about50,000:1 or even about 1,000:1 to about 20,000:1.

Typical oxidizers suitable for the practice of the present inventioninclude, without limitation, air, ozone, oxygen, fluorine, sulfur,chlorine, bromine and iodine. Oxygen is preferred when films comprisingoxidized metal nanoparticles are required. In some embodiments, mixturesof gases can be used, for example, chlorine, fluorine or ozone incombination with oxygen or air. In general, a stoichiometric excess ofoxidizer to fuel is preferred with a ratio of about 1.1:1 to about 2:1preferred.

In general, the substrate (also termed support) can be any material thatwill not melt and will maintain structural integrity at the metalspecies-based nanoparticle deposition temperature used in the process.Suitable substrates include without limitation silica fibers, silicon,quartz, stainless steel, steel, glass, aluminum, ceramic and ceramicfibers. The substrates can be optionally coated prior to metal speciesdeposition. Examples of substrates include, without limitation, polishedsilicon and aluminosilicate glass coated with indium tin oxide.

Combustion takes place in a single or multi-element diffusion flameburner.

In some embodiments, the burner comprises an array of closely spacedpassages for introduction of fuel gas, oxidizer gas and vaporized metalprecursor. In a typical arrangement, the passages are separated only bypassage walls that are of sufficient thickness to maintain themechanical integrity of the burner in view of the flame temperature. Theburner passages preferably have regular geometric cross-sections, forexample circular, triangular, square, hexagonal, etc. In otherembodiments, the fuel gas passages can be manifolded together as are theoxidizing gas passages and metal precursor passages. In otherembodiments, the manifolded passageways are in a plurality of groups. Inyet other embodiments, the passageways are individually supplied. Inlarge devices, it may be preferable to provide for a multiplicity ofburner arrays which can be stacked parallel to each other to provide alarge burner surface. In other embodiments, the fuel gas and oxidizergas passageways can be configured in a regular array across the surfaceof the burner such that fuel gas passageways are surrounded by oxidizergas passageways, or oxidizer gas passageways are surrounded by fuel gaspassageways. The spacing of the metal precursor feeds is also, ingeneral, geometrically repetitive.

The surface of the burner is preferably substantially planar. In thecase of smaller burners (e.g., those with less than about 25 cm² ofsurface area) having an array of feed lines, the flame temperatureprofile may decrease in temperature near the edges of the burner. Inthose areas, it may be desirable to raise the height of the passagewaysabove the plane of those in the middle of the device to achieve a moreone-directional temperature profile. Thus, in cross-section, the surfacemay be somewhat of a shallow elliptical, parabolic, hyperbolic, or othershape, with passageways in the middle of the device having a lowerelevation than those near the edges.

In embodiments where single fuel gas, oxidizer gas and vaporized metalprecursor lines are used, the burner can comprise a series of concentrictubes having an arrangement where a first, innermost tube is used forthe introduction of the fuel gas, oxidizer gas, metal precursor, anoptional inert gas, or mixtures thereof; a second tube, annular andconcentric to the first tube, for the introduction of the fuel gas,oxidizer gas, metal precursor, an optional inert gas, or mixturesthereof; and a third tube annular and concentric to the second tube forthe introduction of introduction of the fuel gas, oxidizer gas, metalprecursor, an optional inert gas, or mixtures thereof, wherein at leastone fuel gas, one oxidizer gas and one metal precursor are introduced.

In some embodiments, the fuel gas, oxidizer gas and metal precursor areintroduced to the burner unmixed. In such embodiments, the metalprecursor is preferably introduced with an inert carrier gas. Inertgases include, for example, helium, argon and nitrogen.

In other embodiments, the metal precursor may be mixed with either orboth of the fuel gas and the oxidizer gas in order to maximizestoichiometric homogeneity to yield uniform nanoparticles. For zerovalent or low valent oxidation states, the metal precursor can be mixedwith the fuel gas. For higher oxidation states, the metal precursor canbe mixed with the oxidizing gas. Mixing may be accomplished byvaporizing the metal precursor into a fuel gas or oxidizer gas carrierstream or by combining a vaporized metal gas stream with a fuel gas oroxidizer gas stream.

In the process of the present invention, metal species-basednanoparticles are formed in a FLAR by thermal reaction. When anoxidizing gas is present, metal oxide nanoparticles are formed bythermal oxidation. In the absence of an oxidizing gas, such as when thefuel is sodium, zero valence metal nanoparticles can be formed. Themetal species-based nanoparticles are then deposited from the hot flameregion onto a cooled substrate as a film via thermophoresis. The filmstypically exhibit two morphologies. The first is a well sinteredcolumnar structure. The second is a particulate morphology caked ontothe substrate.

Columnar morphology is defined by two criteria; shape and crystallinity.The shape criterion is that of a column, i.e., continuous individualstructures that are oriented roughly normal to the substrate, asillustrated in FIG. 2. The columns are approximately normal to thesubstrate in that, for example, at least about 80% or at least about 90%of the structures have a central axis which is normal ±20 degrees. Thosestructures have an average width, w, and height, h, where the shapecriteria is h>w. Columnar morphology is typically characterized by lowsurface area and superior electronic properties. Columnar titaniumdioxide is depicted in the scanning electron micrograph (“SEM”) image ofFIG. 2. The crystalline criterion is based on grain size. Grain size isthe characteristic dimension, or size, associated with a region of thesame crystalline structure and orientation in space, illustrated in FIG.3. Grain size can be measured by several methods known in the art,including x-ray diffraction (XRD) and transmission electron microscopy(TEM). The grain-size (X_(s)) criterion for the columnar morphology isw/10>X_(s). In some embodiments, the nanostructure morphology ispredominantly columnar where the nanoparticles have an average particlesize of less than about 20 nanometers and the columns have a short rangecrystalline order of about 1 to about 50 nanometers (“nm”). Themorphology is predominantly columnar when, for example, at least about80% or at least about 90% of the deposited metal species-basednanoparticles constitute columns. Columnar morphology generally resultswhen relatively small nanoparticles are deposited onto a cooled, butrelatively high temperature, substrate wherein the nanoparticles arerestructured by sintering to form columns. Columnar film formation fortitanium dioxide is illustrated in FIG. 4 along with SEM side-viewimages of columnar morphology and SEM images of a highly crystallinesingle column. Also depicted in FIG. 4 is a TEM image for a highlycrystalline single column showing diffraction from the [103] and [101]planes of anatase. Columnar morphology is also depicted in the SEMimages in FIG. 5 through FIG. 8.

Granular morphology generally comprises metal species-basednanoparticles caked onto a substrate. Granular morphology generallyresults when relatively large nanoparticles are deposited onto arelatively low temperature substrate to form fractal structures thatundergo minimal restructuring after deposition. The average particlesize range is from about 10 nm to about 100 nm. In general, the grainsize is less than about three times the size of the metal species-basednanoparticles before deposition. Granular films are characterized by ahigh surface area and superior reactive properties. Granular filmformation on a low temperature glass substrate is illustrated in FIG.9A. Also depicted in FIG. 9B is a SEM of a side view of a titaniumdioxide film having granular morphology. Depicted in FIG. 9C is a TEMimage of a granular titanium dioxide fractal. Finally depicted in FIG.9D is a TEM image of titanium dioxide polycrystalline electrondiffraction rings corresponding to the [101], [004], [200], [105] and[205] reflections of anatase, moving from the center of the ringoutwards. Granular morphology is also depicted in the SEM images in FIG.10 through FIG. 13.

Based on experimental evidence to date, it is believed that crystallinemorphological characteristics such as crystal phase and grain size isgenerally determined by aerosol phase dynamics and the metalspecies-based nanoparticle sintering behavior on the substrate.

Aerosol phase behavior, such as chemical reaction of the precursor andaerosol dynamics, can affect the film morphology as indicated in FIG.14. If the characteristic reaction time for the reaction of theprecursor (“t_(rxn)”) is larger than the nanoparticle residence time inthe flame (“t_(res)”) then a CCVD or CVD process would be expected. Thiswould result in metal precursor vapor molecules being transported to thesubstrate and reacting on and/or in the substrate to form metal oxide onthe film (in the case of an oxidizing gas). Alternatively, if t_(rxn) isless than t_(res) then the precursor will react in the flame to formmetal oxide nanoparticles that are thereafter deposited on thesubstrate. If the particle sintering time (“t_(sin)”) is smaller thanthe collision time (“t_(col)”) then nearly spherical nanoparticles willresult from the aerosol phase growth process.

Sintering generally results in two small particles combining to form alarger structure with a volume approximately equal to the sum of the twoinitial volumes. For slow sintering dynamics, films predominantly havinggranular morphology are typically formed. Alternatively, For rapidsintering dynamics, films predominantly having columnar morphology aretypically formed. Sintering is a surface tension driven solid statediffusion process, and is generally a function of both initial particlediameter and temperature (see A. Kobata, K. Kusakabe and S. Morooka,Growth and Transformation of TiO2 Crystallites in Aerosol Reactor, AIChEJ., 37, pp. 347-359, (1991); and K. Cho and P. Biswas, Sintering ratesfor pristine and doped titanium dioxide determined using a tandemdifferential mobility analyzer system, Aerosol Sci Tech, 40, pp.309-319, (2006)). Without being bound to any particular theory, it isbelieved that the characteristic time for two particles of the sameinitial diameter to completely sinter into an equivalent-volume sphere,scales with initial diameter to the fourth power and exponentiallydecreases with increasing temperature. Thus, for smaller particles andhigher temperatures, sintering is rapid; and for larger particles andlower temperatures, sintering is slow. Therefore, arrival size ofparticles at the substrate and the substrate temperature are twoparameters that can be varied to influence the film morphology. Particlesize, in turn, is a function of various process parameters and theinteraction of those process parameters. Process parameters include themetal precursor compound, metal precursor feed rate, the fuel source,the oxidizer source, the flame temperature, residence time of formedmetal nanoparticles in the flame region and distance from the flame tothe substrate.

The flame temperature may be adjusted by varying the fuel gas, byvarying the ratio of fuel gas to oxidizer gas (i.e., flamestoichiometry), by introducing a non-reactive (i.e., inert gas) into oneor more of the fuel gas, oxidizer gas or metal precursor streams, or bycombinations thereof. For example, a hydrocarbon fuel gas typicallyproduces a cooler flame than does hydrogen or sodium. In someembodiments, a hydrocarbon fuel gas can be admixed with hydrogen. Thepresence of non-reactive gases will act to reduce flame temperature.Flame temperature can vary from about 200° C. to about 5000° C., fromabout 300° C. to about 4000° C. or even from about from about 300° C. toabout 4000° C. Depending on the identity of the metal species-basednanoparticle, the temperature can be, for example, about 500° C., 600°C., 700° C., 800° C., 900° C., 1000° C., 1100° C., 1200° C., 1300° C.,1400° C., 1500° C., 1600° C., 1700° C., 1800° C., 1900° C., 2000° C.,2100° C., 2200° C., 2300° C., 2400° C., 2500° C., 2600° C., 2700° C.,2800° C., 2900° C., 3000° C., 3100° C., 3200° C., 3300° C., 3400° C.,3500° C., 3600° C., 3700° C., 3800° C., 3900° C. or even 4000° C. ormore. In the case of titanium dioxide nanoparticles, a temperaturebetween about 2500° C. and about 3500° C. is preferred.

The temperature of the substrate can also affect sintering rate.Experimental evidence to date indicates that at low temperaturesgranular films are formed due to the low sintering rate amongst thedeposited particles. At higher substrate temperatures, will sinteredcolumnar films can be obtained. At very high temperatures the films cananneal out resulting in the collapse of formed columnar structures.Substrate temperature can be controlled by various means. As depicted inFIG. 1, one surface 39 of the substrate 35 is in direct or indirectcontact with a surface 41 of cooled heat sink 40 for control of thetemperature of substrate surface 37. In some embodiments, thetemperature of surface 41 can be controlled by recirculating a coolingfluid such as water, glycol, brine or the like through heat sink 40. Athermocouple (not depicted in FIG. 1) can be used to monitor thetemperature at or near surface 41 or at or near substrate surface 39.The thermocouple can be integrated with a cooling fluid flow controlmeans, such as a valve, to form a temperature control loop for themaintenance of substrate temperature at a preselected setpoint. In otherembodiments, substrate surface 39 can be controlled by passing a gas,such as air, over the surface. In yet other embodiments, one or morethermal resistance devices 42 can be inserted between substrate surface39 and cooled heat sink surface 41. Selection of a thermal resistancedevice depends on the desired substrate surface 37 temperature. Typicaldevices include heat-treated glass, stainless steel and aluminum.Depending upon the identity of the metal species-based nanoparticledeposited on the substrate and the desired morphology, the substratetemperature can be controlled in the range of about 20° C. to about2000° C., for example, about 20° C., 50° C., 100° C., 150° C., 200° C.,250° C., 300° C., 350° C., 400° C., 450° C., 500° C., 550° C., 650° C.,700° C., 750° C., 800° C., 850° C., 900° C., 950° C., 1000° C., 1050°C., 1100° C., 1150° C., 1200° C., 1250° C., 1300° C., 1350° C., 1400°C., 1450° C., 1500° C., 1550° C., 1600° C., 1650° C., 1700° C., 1750°C., 1800° C., 1850° C., 1900° C., 1950° C. or even about 2000° C. In thecase of titanium dioxide, a substrate temperature range of about 20° C.to about 350° C. will generally yield a granular type film whilesubstrate temperatures in excess of 350° C. will generally yield acolumnar type film.

Metal precursor feed rate affects nanoparticle film morphology throughthe relationship to formed nanoparticle size. For a given substratetemperature, sintering dynamics are influenced by the size of thenanoparticles as they arrive at the substrate. Small nanoparticles tendto sinter at a faster rate than do larger nanoparticles. High metalprecursor feed rates produce large metal species-based nanoparticles andlow metal precursor feed rates produce small metal species-basednanoparticles. Large nanoparticles favor the formation of granular typefilms whereas small nanoparticles favor the formation of columnar typefilms. However, given sufficient sintering time, even largenanoparticles can form columnar films. Metal species-based nanoparticleshaving an average size of less than about 100 nm, less than about 50 nmor even less than about 20 nm are preferred for columnar films. In someembodiments, two or more metal species-based nanoparticles combine toform an aggregate before deposition onto the substrate.

Film thickness can be controlled by metal precursor feed rate,deposition time, and combinations thereof. A film thickness of fromabout 10 nm to about 1 mm is preferred with narrower preferred rangesprimarily being dictated by the intended use. For instance, foroptoelectrical films a thickness of from about 10 nn to about 20micrometers (“μm”) is preferred. For a catalytic films a thickness offrom about 1 μm to about 1000 μm is preferred.

The nanostructured films of the present invention are useful for thepreparation of high efficiency photo-watersplitting cells for thepreparation of hydrogen gas and for the preparation of high efficiencydye-sensitized solar cells and p/n junction oxide solar cells.

In some embodiments, depicted in FIG. 28, photo-watersplitting cells areprepared from the nanostructured films of the present invention. Thecell comprises a substrate with a nanostructured film having columnarmorphology that functions as a photoanode, a counter electrode (cathode)and an external circuit. The film is illuminated by sunlight and usesthe energy in the sunlight to split water into hydrogen and oxygen. Itis expected that photoelectrodes based the columnar morphology willachieve sunlight-to-hydrogen conversion efficiencies of approximately10%, 11%, 12%, 13%, 14% or even 15%.

In other embodiments, depicted in FIG. 29, dye sensitized solar cellsare prepared from the nanostructured films of the present invention thatconvert sunlight to electricity at high efficiency. The cells comprisean electron conducting layer formed from the columnar films of thepresent invention, a light absorbing layer such as an organic dye, andhole-conducting layer (redox electrolyte). Sunlight is harvested in thelight absorbing layer, which then injects electrons into theelectron-conducting layer and holes in the hole-conducting layer. One orall of the layers can be formed from the columnar films of the presentinvention. Sunlight-to-electricity conversion efficiencies of 10%, 11%,12%, 13%, 14%, 15%, 16%, 17%, 18%, 19% or even 20% are expected.

In yet other embodiments, depicted in FIG. 30, p/n junction solar cellscould be prepared from the nanostructured films of the present inventionthat convert sunlight to electricity at high efficiency. The cellscomprise two layers, an n-type oxide semiconductor layer (e.g. TiO₂)where electrons are the mobile charge-carrier, and a p-type (e.g. NiO)layer where holes are the mobile charge carrier. There is a depletionzone between the two layers that drives charge-carriers to theinterface, thus driving electricity through the external circuit. Thisdesign is similar to conventional silicon solar cells. The p and nlayers can be formed from semiconductors formed from the columnar metaloxides of the present invention. Such devices are expected to convertsunlight to electricity with an efficiency of 10%, 11%, 12%, 13%, 14%,15%, 16%, 17%, 18%, 19% or even 20%.

Having described the invention in detail, it will be apparent thatmodifications and variations are possible without departing from thescope of the invention defined in the appended claims.

EXAMPLES

The following non-limiting examples are provided to further illustratethe present invention.

Example 1

The experimental apparatus comprised a precursor feed system, a FLAR anda temperature controlled deposition substrate as generally depicted inFIG. 1. The precursor feed system comprised a bubbler containingtitanium isopropoxide (TTIP, Aldrich: 205273, 97% purity) through whichargon (Grade 4.8) was bubbled at varying flow rates. The temperature ofthe bubbler was maintained at 30° C. To prevent condensation of theTTIP, the lines leading up to the flame reactor were heated toapproximately 50° C. The TTIP feed rate was calculated based on thesaturation pressure and was assumed to be proportional to the argon flowrate through the bubbler. An additional argon line was added so thetotal argon flow rate could be held constant at 2.0 Lpm (liters perminute at STP) while varying the flow through the bubbler. The FLAR wasa premixed methane-oxygen burner made of a 0.95 cm (⅜ inch) O.D.stainless steel tube into which was placed three 0.32 cm (⅛ inch) tubesdesigned to achieve an optimal outlet velocity (about 450 cm/s) througha 0.16 cm² area which prevented flame blow off and extinction. Themethane flow rate was fixed at 0.5 Lpm and the oxygen flow rate wasfixed at 1.5 Lpm, above the stoichiometric value of 1.0 Lpm for completecombustion. The additional oxygen was provided to ensure completeoxidation of TTIP to produce stoichiometric TiO₂. All gas flow rateswere controlled by digital mass flow controllers (MKS Instruments,Wilmington Mass.), and the four gas streams were combined and sentthrough the burner to the flame region.

The flame temperature distribution was measured using a type Rthermocouple (Pt—Rh:Pt 2 mm bead) and corrected for radiation from thethermocouple bead. The average flame temperature was 1927° C.±100° C. Atemperature controlled substrate was used onto which the titaniumdioxide particles formed in the flame were deposited. The substrate wasa square piece of optically polished silicon, 1.5 cm on a side. Thesilicon substrate was attached to a water-cooled heat sink to controlthe temperature of the substrate and the resultant crystal phase of thefilm (anatase versus rutile). Intimate thermal contact was establishedbetween the substrate and heat sink by applying a small amount of silverthermal paste (Arctic Silver, Visalia Calif.).

The substrate temperature was approximately 427° C., as measured by asmall-bead type K thermocouple cemented to the substrate surface, whenthe silicon substrate was pasted directly to the heat sink. The thermalresistance of the substrate to heat-sink interface was increased byinserting an intermediate piece of high-temperature glass (Ace-Glass,Vineland N.J.) between the substrate and the heat sink. Under thoseconditions, the resulting temperature of the substrate was 637° C. Aneven higher temperature was achieved by inserting a second piece ofglass which increased the substrate temperature to approximately 807° C.However, unless otherwise stated, only one intermediate piece of glasswas used and particles were deposited at a substrate temperature of 637°C.

Particles in the aerosol phase in the flame region (i.e., beforedeposition onto the substrate) were characterized by measurements by TEM(JEOL 1200 120 kV) and online scanning mobility particle spectrometry(SMPS) (Platform 3080, Nano-DMA 3085, TSI Corp., Shoreview Minn.). TEMand SMPS measured two different particle size distributions. From TEMimages, the primary particle size distribution was obtained, which is acharacteristic for dynamic processes such as sintering. The SMPSmeasured the mobility equivalent aerosol size distribution. The meansize measured by the SMPS could be larger than the primary particlesize, especially if agglomeration is prevalent in the system.

After substrate deposition, the TiO₂ films where characterized by SEM(Hitachi model S-4500 field emission electron microscope operating at 15kV) to determine film thickness and morphology. For thicknessmeasurements, the silicon substrates were cleaved down the middle of thefilm and attached vertically to the SEM specimen mount. The films werethen imaged along a line of sight parallel to the substrate surface toobtain side view images. The crystalline phase and grain size of thefilms were determined using x-ray diffraction (“XRD”) (Rigaku DMax x-raydiffractometer).

The effect of metal precursor (TTIP) feed rate and deposition time onformed film characteristics were evaluated. Those parameters wereindependently varied to determine the effects on the aerosol phaseparticle size distributions, film grain size, growth rate, filmthickness, crystalline phase, and photocurrent.

In a series of 15 trials as reported in Table 1 below, the metalprecursor gas, methane gas and oxygen were supplied to the FLARapparatus described above. The gas phase metal precursor was rapidlyoxidized in the high temperature environment to form nanoparticles. Thenanoparticles were then directed by thermophoretic forces from the hotgas to the water-cooled substrate and deposited to form a film.

A summary of the experimental parameters and results is presented inTable 1 where TTIP feed rate is in mmol/hr, Average D_(p) from TEM isreported in nm, Average D_(p) from SMPS is reported in nm, Filmthickness was measured by SEM and is reported in nm, Crystal phaserefers to crystalline phase and was measured by XRD, Grain size wasmeasured by XRD and is reported in nm, Average growth rate is reportedin nm/sec, and Photocurrent is reported in nanoamperes (“nA”).

TABLE 1 Experimental Aerosol Phase Conditions Measurements DepositionTTIP Feed Average D_(p) Average D_(p) Trial Time (sec) Rate from TEMfrom SMPS 1 90 0.27 — 10.8 2 180 0.069 4.5 4.3 3 180 0.14 — 7.2 4 1800.27 — 10.8 5 180 0.55 8   13.1 6 360 0.069 4.5 4.3 7 360 0.27 — 10.8 860 0.14 — 7.2 9 90 0.14 — — 10 120 0.14 — 7.2 11 240 0.14 — 7.2 12 3600.14 — — 13 480 0.14 — 7.2 14 760 0.14 — — 15 960 0.14 — 7.2 FilmMeasurements Film Crystal. Grain Average Photo- Trial Thickness PhaseSize Growth Rate Current 1 180 — — 2 — 2 79 Anatase 47.3 0.44 46.86 3213 Anatase 49.1 1.18 22.1 4 322 Anatase 40.7 1.79 0.64 5 2010 Anatase9  11.17 2.53 6 233 — — 0.65 — 7 730 — — 2.03 — 8 42 Anatase — 0.7 — 964 Anatase — — 2.6 10 86 Anatase — 0.72 — 11 204 Anatase — 0.85 — 12 311Anatase — — 1200 13 417 Anatase — 0.87 — 14 692 Anatase — — 15,000 15889 Anatase — 0.93 —

In reference to FIG. 14 and Table 2 below, the various aerosol phasecharacteristic times were estimated to determine which depositionprocess was dominant. The residence time in the flame was estimated byassuming that the flame cross-section was equal to the burner outletarea (i.e., no jet expansion or ambient fluid entrainment) and gasesimmediately reached the flame temperature and the path-length was equalto the burner-substrate distance of 2 cm. Under those assumptions, aresidence time (t_(res)) of 0.59 ms was calculated. The calculatedcharacteristic reaction time of the TTIP thermal decomposition was 0.12ms, which was less than the residence time, implying that TTIP rapidlyreacts to form TiO₂ particles in the flame. The characteristicparticle-particle collision time (assuming 5 nm particles and a TiO₂molecular concentration calculated from the TTIP feed rate (about 10¹⁵cm⁻³)) was about 0.1 ms and the sintering time for the 5 nm particleswas 7.4×10⁻⁵ ms, implying that particles are present as individualspheroids in the flame. Under the flame conditions used in this study,individual particle deposition was determined to be the dominant processfor deposition.

TABLE 2 Summary of estimated characteristic times encountered in theaerosol phase Characteristic Time Symbol Value Residence time in flamet_(res) 0.59 ms Thermal decomposition time for t_(rxn) 0.12 ms formationof TiO₂ from TTIP 5 nm particle-particle collisions t_(col) about 0.1 ms5 nm particle sintering at 1927° C. t_(sin) 7.4 × 10⁻⁵ ms

The effect of TTIP feed rate on the particle size distribution is shownin FIG. 15 and FIG. 16. The aerosol size distribution was measuredonline with the SMPS. The primary particle size distribution wasmeasured from TEM images by measuring the diameters of about 130particles. A log-normal curve fit was performed using Origin (Microcal,v 4.1) to determine distribution parameters. The particle size increasedfrom a mean of 4.5 nm at a TTIP feed rate of 0.069 mmol/hr (Trial 2 andFIG. 15) to 8.0 nm at a TTIP feed rate of 0.55 mmol/hr (Trial 5 and FIG.16), as measured by TEM. For the lower TTIP feed rate the SMPSmeasurement agreed well with the TEM. However, at the higher TTIP feedrate, the SMPS measured a larger diameter than the one obtained fromTEM. The discrepancy between the particle size measured from TEM andSMPS at the higher feed rate was likely due to biases that resulted fromagglomeration in the dilution probe during sampling. Despite this smalldiscrepancy, the measurements clearly illustrated the trend ofincreasing particle size with increasing TTIP feed rate.

It is believed, without being bound to any particular theory, that theincrease in particle size as a function of TTIP feed rate was due toenhanced coagulational growth in the flame region. At the flametemperature, the reaction to form TiO₂ molecules from TTIP was fast(t_(rxn) of 0.12 ms, Table 2 and FIG. 14). Once formed, the TiO₂molecules collided to form particles which subsequently grew through acoagulational growth process. The sintering time (t_(sin) of 7.4×10⁻⁵ms, Table 2 and FIG. 14) was much smaller than the collision time(t_(col) about 0.1 ms, Table 2 and FIG. 14) under those conditions,ensuring that near spherical particles resulted from the aerosol phaseparticle growth process. For a constant residence time, the final sizeof the coagulational growth process scaled with the initialconcentration of TiO₂ molecules, or TTIP feed rate. Through the TTIPfeed rate, the size of particles as they arrived at the substrate wastuned to control the restructuring dynamics on the substrate.

Through its influence on the particle arrival size, which changed thefilm restructuring dynamics, it is believed that the TTIP feed rateaffected the final film grain size and morphology. The arrival size ofparticles at the substrate was approximately 4.5 nm and 8.0 nm for TTIPfeed rates of 0.069 mmol/hr (Trial 2 and FIG. 15) and 0.55 mmol/hr(Trial 5 and FIG. 16), respectively. The characteristic sintering timefor the higher TTIP feed rate was an order of magnitude longer than forthe lower TTIP feed rate, thus changing the sintering dynamics and finalfilm morphology. This difference in morphology can be seen in FIG. 17 bycomparing the scanning electron micrograph side view images of titaniumdioxide prepared in a flame aerosol reactor at an titanium isopropoxidemetal precursor feed rate of 0.069 millimols per hour for 180 secondsand imaged at high resolution (a) versus titanium dioxide prepared at anisopropoxide metal precursor feed rate of 0.55 millimols per hour for180 seconds and imaged at low resolution (b1) and at an isopropoxidemetal precursor feed rate of 0.55 millimols per hour for 180 seconds andimaged at high resolution (b2). For small particle arrival size, or fastsintering dynamics, a columnar structure was observed (FIG. 17( a)). Thesintered columnar morphology was characterized by continuous verticalcolumns, observed in the SEM, and large average grain size, measuredfrom XRD peak broadening using the Scherrer equation. As smallparticles, which were 4.5 nm in the aerosol phase, sintered, theycombined to form larger structures that had longer range crystallineorder, hence the 47 nm grain size observed in the XRD (Trial 2).

Alternatively, for large particle arrival size, or slow sinteringdynamics, a granular particulate morphology was observed (FIGS. 17( b 1)and (b 2)). The particulate morphology was characterized by fractalstructures, observed in the SEM and a small average grain size. Due tothe slow sintering dynamics, the large particles did not combine andinstead remained isolated with approximately the same grain size as waspresent in the original particle before it deposited. This can be seenby comparing the average grain size of the unsintered film deposited at0.55 mmol/hr TTIP feed rate (FIG. 18) to the aerosol phase particle sizefrom TEM at the same conditions (FIG. 16). Due to the 1927° C. flametemperature, the particles in the aerosol phase were expected to benearly single crystal. From the TEM measurements, the large particleswere approximately 8 nm before they deposited onto the substrate, whichis similar to the 9 nm grain size of the film, which would be expectedif the particles did not experience significant sintering once depositedonto the substrate.

The temperature of the substrate was evaluated to determine the affecton the sintering rate. This was verified qualitatively by changing thesubstrate to heat sink thermal resistance, to alter the substratetemperature. At low temperatures, particulate films were observed in theSEM, due to low rates of sintering amongst the deposited particles. Athigher substrate temperatures, well sintered columnar films wereobtained that were similar in appearance to the sintered columnar SEMimages (FIG. 17( a)).

Film thicknesses were controlled by varying both the deposition time andTTIP feed rate. Films were deposited for different times and imaged bySEM to measure thickness. In FIG. 19, selected side view SEM images areshown that illustrate the evolution of film thickness for severaldeposition times at a fixed titanium isopropoxide metal precursor feedrate of 0.14 millimols per hour. Film (a) resulted from a 120 seconddeposition time, film (b) resulted from a 240 second deposition time,and film (c) resulted from a 960 second deposition time. As depicted inFIG. 20, film thickness increased roughly linearly with deposition time.In addition, the growth rate increased with TTIP feed rate in responseto the increased mass flux to the substrate.

Films having selected film morphology and thickness for determination ofthe photoelectric properties were prepared by deposition ontoelectrically insulating high-temperature glass substrates (Borosilicate,ACE Glass, Vineland N.J.) at a slightly elevated temperature of 727° C.The photoelectric properties of the films were characterized byphotocurrent measurements under UV irradiation from a 100 watt 360 nmlamp (Blak-Ray, Model B-100A). Photocurrent measurements of the filmswas performed to understand the relationship between filmcharacteristics and photoactivity. An electrical circuit was created byconnecting lead wires to the film and a DC power supply. Thephotocurrent was measured by applying a voltage of 22V to two silverelectrodes (SPI supplies, West Chester Pa.) that were painted 1 cm aparton the film surface. The resulting current between the electrodes wasmeasured using a picoammeter (Keithly Instruments, Cleveland Ohio). FIG.21 and FIG. 22 depict photocurrent measurements that were taken forfilms deposited at several TTIP feed rates and deposition times wherethe photocurrent was at the noise level of the picoammeter when the uvlamp was switched off.

The data in Table 1 indicate that morphology had an effect on thephotocurrent. The films deposited at lower TTIP feed rates exhibitedgreater photocurrents than the films formed with higher TTIP feed rates.At lower TTIP feed rates, the films had a sintered columnar likestructure with a large grain size. At higher TTIP feed rates, the filmshad a particulate like structure with a small average grain size. Thephotocurrent is related grain size, but also depends on interfacialproperties and can change for slight alterations of the film morphology.For instance, it is more difficult for free charge carriers to migrateto the electrodes in particulate films with small grain size because ofparticle-particle interfacial migration barriers (see Jongh P E andVanmaekelbergh D., Trap-Limited Electronic Transport in Assemblies ofNanometer-Sized TiO2 Particles, Phys. Rev. Lett 1996; 77:3427-3430). Incontinuous and well sintered films with larger grain size, free chargecarriers encounter fewer migration barriers and can freely flow to theelectrodes. This result is in agreement with other work that has found ahigher electron drift mobility in columnar films, compared to granularparticulate films (Aduda B O, Ravirajan P, Choy K L and Nelson J.,Effect of morphology on electron drift mobility in porous TiO2,International Journal of Photoenergy 2004; 6:141-147).

The photocurrent was larger for the thicker films (longer depositiontimes), while maintaining the well sintered, columnar morphology. As thethickness of the sintered columnar film was increased, it interceptedmore light, thus generating an increased number of free charge carriers.The increased number of free charge carriers resulted in an increase inthe measured photocurrent. The photocurrent measurements illustrate thatthe deposited films are photoactive and there are clear trends in thephotoactivity as a function of controllable film characteristics.

Example 2

A FLAR was used to synthesize TiO₂ films with controlled morphology andthickness to evaluate the optoelectronic properties of watersplittingand photovoltaic performance. A FLAR was assembled comprising aprecursor feed system, premixed methane-oxygen flame and a water-cooleddeposition substrate (FIG. 23). The FLAR had digital mass flowcontrollers (MKS, Wilmington Mass.) to control the processes gasesmethane, oxygen, dilution-argon and carrier-argon. TTIP (Aldrich:205273, 97% pure), was used to synthesize TiO₂ in the gas-phase. Theprecursor was delivered to the flame region by passing carrier-argonthrough a homemade bubbler that was maintained at 37° C. Thecarrier-argon flow rate was kept constant at 2.0 Lpm (at STP), whichcorresponded to a TTIP feed rate of approximately 1.2 mmol/hr, based onthe vapor pressure of TTIP. The methane, oxygen and dilution-argon flowrates were kept constant at 0.9, 2.7 and 2.0 Lpm, respectively. All 4process gasses were combined and sent through the burner to the flameregion.

An essentially soot-free flame was generated by combustion of methaneand oxygen and was used to oxidize TTIP to form TiO₂ nanoparticles. Thecalculated adiabatic flame temperature was about 3027° C. A two-colorpyrometer (Omega, iR2C-1000-53-C4EI) was used to measure the actualflame temperature. The reading fluctuated around the upper limit of theinstrument at about 2727° C. In the flame, the TTIP rapidly reacted toform TiO₂ nanoparticles. Those nanoparticles underwent a collisionprocess, as they transversed the flame, to reach a prescribed size uponarrival at the temperature-controlled substrate. Upon arriving at thesubstrate, the nanoparticles experienced a strong thermophoretic force,arising from the temperature gradient pointing from the hot flame to thecooler substrate, and were deposited out of the aerosol-phase onto thesubstrate.

The substrate was piece of aluminosilicate glass coated with 200 nm ofindium tin oxide on one side (ITO, Delta Technologies, StillwaterMinn.), in intimate thermal contact with a copper substrate holder.Thermal contact was established between the ITO substrate and substrateholder by applying a small amount of silver thermal paste (ArcticSilver, Visalia Calif.). A type-K thermocouple is embedded in the holderabout 0.33 cm (⅛ inch) behind the substrate, to estimate the substratetemperature. Due to resistance-induced temperature drops, thetemperature measured at this location was system specific, and muchlower than the actual surface temperature of the substrate. It wasassumed that the temperature measured by the thermocouple linearlyreflected the actual substrate temperature. Henceforth, the temperaturemeasured by the thermocouple is referred to as the substratetemperature. Before introduction of TTIP into the flame, the substratewas allowed to heat up until the temperature stabilized. Once thetemperature stabilized (about 5 minutes) the TTIP was introduced andfilm deposition commenced. During deposition, the substrate temperaturefluctuated by less than 3° C. A copper mask was used to restrict thedeposition (film) area to about 1 cm².

Two different film morphologies were produced by the FLAR. The first wasa granular morphology, comprising nanoparticles caked onto thesubstrate, illustrated by the electron microscope images in FIG. 9. Thesecond was a columnar morphology, comprising highly crystalline onedimensional (1D) structures oriented normal to the substrate,illustrated in FIG. 4. High resolution TEM analysis of single columnsscraped off of the substrate showed that many of the columns are singlecrystal anatase.

The sintering behavior on the substrate was controlled by altering thearrival size of particles at the substrate and the substratetemperature. Those parameters were varied simultaneously though theburner-substrate distance. It is known that particle size increases withresidence time in particle synthesis processes, which in this casechanges with the burner-substrate distance (see Jingkun Jiang, PratimBiswas and Da-Ren Chen, Flame Synthesis of nanoparticles with rigorouscontrol of their size, crystal structure and morphology for biologicalstudies, Nanotechnology, 18, pp. 8, (2007) and L. Mangolini, E. Thimsenand U. Kortshagen, High-Yield Plasma Synthesis of Luminescent SiliconNanocrystals, Nanoletters, 5, pp. 655-659, (2005)). Additionally, thetemperature distribution in premixed flames is a function of axialposition and can be used to tune the substrate temperature. The particlesize and substrate temperature were measured at two burner-substratedistances, 1.7 cm and 4.1 cm, respectively. The measured substratetemperature was 185° C. and 130° C. for 1.7 cm and 4.1 cm, respectively.The average particle size, measured from TEM images of particlesextracted from the flame, was 3.1 nm and 3.9 nm at 1.7 cm and 4.1 cm,respectively. For shorter burner-substrate distances, smaller particleswere deposited at a higher substrate temperature, resulting in rapidsintering dynamics on the substrate. At longer-burner substratedistances, slightly larger particles were deposited at a reducedsubstrate temperature, resulting in slower sintering dynamics. Thedistance was measured from the burner outlet to the substrate mask.Granular films were formed at longer burner-substrate distances, whilecolumnar films are formed at shorter distances. This can be seen in FIG.9 and FIG. 4, where micrographs are presented for films deposited atburner-substrate distances of 4.1 cm and 1.7 cm, respectively, whilekeeping all other parameters constant. At each burner-substratedistance, or morphology, the film thickness was systematically variedthrough the deposition time. The deposition time was varied from 0.5 to17 minutes, which resulted in films with thicknesses in the range from100 to 12,000 nm.

The films where characterized using SEM, TEM and XRD. Both SEM and TEMwere used to characterize the film morphology. Side-view SEM images wereused to estimate the film thickness. The crystalline phase (anatase vs.rutile) was verified using XRD and TEM. Both XRD and TEM were used tocharacterize the average crystalline grain size.

Watersplitting performance was determined using a conventionalelectrochemical cell (see J. Nowotny, C. C. Sorerell, L. R. Sheppard andT. Bak, Solar-hydrogen: Environmentally safe fuel for the future,International Journal of Hydrogen Energy, 30, pp. 521-544, (2005)). Thecell consisted of the TiO₂ film (working electrode) connected through anexternal circuit to a platinum wire (counter electrode), both electrodesimmersed in a 1 M KOH aqueous electrolyte at a pH of 14. Using a DCpower supply, an electric potential of 0.8 volts was applied between theTiO₂ film and platinum wire to enhance extraction of electrons from thefilm. The current through the external circuit was measured using anammeter. The background current in the dark was about 30 μA. The TiO₂films were illuminated by a 400 W Xe arc lamp, equipped with a waterfilter, at a light intensity of 24 mW/cm² at wavelengths below 400 nm(TiO₂ band gap), as measured by a spectroradiometer (InternationalLight, Peabody Mass.). Upon illumination, hydrogen bubbles visiblyformed on the platinum wire while oxygen formed on the TiO₂ film. Underillumination, the current through the external circuit was assumedproportional to the watersplitting hydrogen production rate. Thephotocurrent through the external circuit and power conversionefficiency were used as watersplitting performance metrics.

The watersplitting photocurrent was measured for columnar and granularfilms of varying thickness. As described above, columnar films weredeposited at a burner-substrate distance of 1.7 cm with thicknesses inthe rage from 100 to 3000 nm; while granular films were deposited at 4.1cm in the thickness range 600 to 12000 nm. The watersplitting efficiencywas estimated from the watersplitting photocurrent by performing anenergy balance on the watersplitting cell. Energy entered the cell inthe form of uv-light and electrical work, and left the cell in the formof hydrogen gas. The ratio of energy-output to energy-input was taken asthe efficiency, using the following equation:

η=j _(p) E ^(o) H/(I _(o) +j _(p) V _(app))

where j_(p) is the measured photocurrent, E_(H) ^(o) is the standardreduction potential of water formation from hydrogen and oxygen (1.23V), I_(o) is the incident light intensity (24 mW/cm²) and V_(app) is theapplied voltage from the power supply (0.8 V). Both thickness andmorphology had an effect on the watersplitting performance.

Photovoltaic performance was determined by constructing dye-sensitizedsolar cells using conventional procedures and components (see M.Gratzel, Photoelectrochemical Cells, Nature, 414, pp. pp. 338-344,(2001). The TiO₂ films were sensitized to visible light by overnightsoaking in an ethanol solution containing 3.3×10⁻⁴ molar Ru-based dye(Ruthenium 535-bisTBA, Solaronix, Aubonne Switzerland). Counterelectrodes were fabricated by sputter coating about 150 nm platinumfilms onto ITO substrates. A conventional acetonitrile based electrolyte(AN-50, Solaronix) using I₂ ⁻/I⁻ as the redox couple was used totransfer electrons from the platinum counter electrode to oxidized dyemolecules on the TiO₂ surface. The two electrodes were sealed usingapproximately 8 layers of SX1170 sealant (Solaronix), resulting inapproximately 0.48 mm separation between the electrodes. The cells wereilluminated by a Xe arc lamp equipped with an AM1.5G filter at a totallight intensity of about 124 mW/cm². The spectral distribution of lightintensity was different from a AM1.5G solar standard. The spectral powerdensity was as follows: UV (250 nm-400 nm)−18.5 mW/cm²; visible (400nm-700 nm)−26.4 mW/cm²; IR (700 nm-1050 nm)−78.0 mW/cm². The lightspectrum was more heavily weighted in the UV and IR, compared to AM1.5.It is known that the Ru-based dye is optimized for visible light anddoesn't perform well in the UV and IR (see M. Gratzel,Photoelectrochemical Cells, Nature, 414, pp. pp. 338-344, (2001)). Thedye-sensitized cells presented herein would likely perform much betterunder AM1.5 illumination. The standard performance metrics, open circuitvoltage (V_(oc)), short-circuit current (I_(sc)), fill factor (FF) andconversion efficiency (η) were used to quantify the cell performance.

The photocurrent increased with thickness, until reaching a thresholdvalue, and then decreased for thicker films. This behavior was observedfor both morphologies. The threshold thickness represents the optimumbalance between light absorption and transport losses. As the filmthickness increases more light is absorbed. However, after a certainpoint the light gets entirely absorbed. An increase in thickness beyondthe critical value simply increases the time it takes forcharge-carriers to migrate through the film, making recombinationprocesses competitive with transport. The photocurrent for films thinnerthan the threshold value is light-absorption limited, while thickerfilms are transport limited

Watersplitting performance as a function of film morphology is shown fora columnar film (FIG. 24) and a granular film (FIG. 25) wherein thecolumnar film was deposited at a burner-substrate distance of 1.7 cm andthe granular film was deposited at 4.1 cm. The power conversionefficiencies in FIGS. 24 and 25 are labeled in parenthesis next to eachpoint. Photocurrent was a function of film morphology. It can be seenfrom FIG. 24, columnar films deposited at 1.7 cm had 2 orders ofmagnitude higher photocurrents than granular films deposited at 4.1 cm(FIG. 25) reaching a uv-light to hydrogen conversion efficiency of about11%. That efficiency is competitive with the best reported values in theliterature (see M. Paulose, K. Shankar, S. Yoriya, H. E. Prakasam, O. K.Varghese, G. K. Mor, T. A. Latempa, A. Fitzgerald and C. A. Grimes,Anodic growth of highly ordered TiO2 nanotube arrays to 134 mu m inlength, J Phys Chem B, 110, pp. 16179-16184, (2006)). It is believedthat the columnar films had higher photocurrents because of theirsuperior electronic properties. For FLAR-produced TiO₂ films, thecolumnar morphology has also been found to have a higherphotoconductivity, relative to the granular morphology (see ElijahThimsen and Pratim Biswas, Nanostructured Photoactive Films Synthesizedby a Flame Aerosol Reactor, AIChE J., 53, pp. 1727-1735, (2007). Also,it has been reported that particle-particle interfaces in granular filmspresent migration barriers for electrons, increasing the time it takesfor electrons to be transported in the film, making recombinationcompetitive with transport (see P. E. de Jongh and D. Vanmaekelbergh,Trap-Limited Electronic Transport in Assemblies of Nanometer-Sized TiO2Particles, Phys. Rev. Lett, 77, pp. 3427-3430, (1996)). Additionally, itis known that for films produced by separate synthesis processes,electron drift velocities are higher in films with 1D morphologies thanin granular films (see B. O. Aduda, P. Ravirajan, K. L. Choy and J.Nelson, Effect of morphology on electron drift mobility in porous TiO2,Int J Photoenergy, 6, pp. 141-147, (2004)). However, other 1Dmorphologies, such as TiO₂ nanotubes, have been found to have similartransport characteristics to granular films. Despite the similarelectron transport characteristics, TiO₂ nanotubes were found to have anorder of magnitude longer recombination time relative to granular films(see K. Zhu, N. R. Neale, A. Miedaner and A. J. Frank, Enhancedcharge-collection efficiencies and light scattering in dye-sensitizedsolar cells using oriented TiO2 nanotubes arrays, Nano Lett, 7, pp.69-74, (2007)). In some cases, it appears that 1D structures offersuperior transport characteristics relative to granular morphologies,while in other cases they offer longer recombination times. Whencomparing granular to columnar films produced by the FLAR, it is notclear whether transport is enhanced, the recombination time islengthened, or if it is a combination of both. However, it is reasonableto conclude that the highly crystalline 1D, columnar films havegenerally superior electronic properties to the granular films,resulting in higher photocurrents, and greatly improved watersplittingperformance.

Dye-sensitized solar cells have different morphological requirementsthan watersplitting cells. In dye-sensitized solar cells, light isabsorbed by dye molecules adsorbed onto the surface of the TiO₂. Surfacearea is important because the amount of dye adsorbed, which enhanceslight absorption, increases with TiO₂ surface area. The increased lightabsorption results in more electron injection into the TiO₂ film, whichincreases the current generated by the solar cell.

Solar cells were fabricated using the 2 different morphologies of TiO₂,granular deposited at a burner-substrate distance of 4.1 cm, andcolumnar deposited at 1.7 cm. Both films were approximately 3500 nm inthickness. Prior to cell construction, the amount of dye adsorbed ontoeach film was determined by uv-vis absorption measurements on dyedesorbed from the films using a 1 mM KOH solution. The cells wereconstructed using the same procedure. The only variable was the titaniafilm.

The granular film has a conversion efficiency about 2 times higher thanthe columnar film. That result contrasts with the watersplittingmeasurements described above where the columnar film outperformed thegranular film. The difference is likely due to the amount of dyeadsorbed onto the TiO₂ film. It can be seen from FIG. 25 and FIG. 26that the columnar film adsorbed approximately 50% more dye than thegranular film. The greater amount of dye on the granular film resultedin more current generated by the cell which increased the conversionefficiency.

When introducing elements of the present invention or the preferredembodiment(s) thereof, the articles “a”, “an”, “the” and “said” areintended to mean that there are one or more of the elements. The terms“comprising”, “including” and “having” are intended to be inclusive andmean that there may be additional elements other than the listedelements.

In view of the above, it will be seen that the several objects of theinvention are achieved and other advantageous results attained.

As various changes could be made in the above compositions and processeswithout departing from the scope of the invention, it is intended thatall matter contained in the above description and shown in theaccompanying drawing[s] shall be interpreted as illustrative and not ina limiting sense.

1. A nanostructured photo-watersplitting cell for the production ofhydrogen, the cell comprising: a photoanode comprising a support and ananostructured metal oxide film disposed on at least one surface of thesupport, wherein the film predominantly comprises a columnar morphologycharacterized as having continuous individual columnar structuresoriented approximately normal to the support wherein the columnarstructures have an average width, w, and a grain size criterion, X_(s),and wherein w/10 is greater than X_(s), and a cathode comprising acounter electrode wherein the nanostructured photo-water splitting cellhas a sunlight to hydrogen conversion efficiency of from about 10% toabout 15%.
 2. (canceled)
 3. The nanostructured photo-water splittingcell of claim 1 wherein the nanostructured metal oxide comprises metaloxide particles having an average particle size of less than about 100nanometers. 4-6. (canceled)
 7. The nanostructured photo-water splittingcell of claim 3 wherein the average particle size is less than about 20nanometers and the nanostructure has a short range crystalline order ofabout 1 to about 50 nanometers.
 8. A nanostructured dye-sensitized solarcell comprising: an electron conducting layer comprising a support and ananostructured metal oxide film disposed on at least one surface of thesupport, wherein the film predominantly comprises a columnar morphologycharacterized as having continuous individual columnar structuresoriented approximately normal to the support wherein the columnarstructures have an average width, w, and a grain size criterion, X_(s),and wherein w/10 is greater than X_(s), a light absorbing layer, and ahole-conducting layer, wherein the nanostructured dye-sensitized solarcell has a sunlight to electricity conversion efficiency of from about10% to about 20%.
 9. (canceled)
 10. The nanostructured dye-sensitizedsolar cell of claim 8 wherein the nanostructured metal oxide comprisesmetal oxide particles having an average particle size of less than about100 nanometers. 11-13. (canceled)
 14. The nanostructured dye-sensitizedsolar cell of claim 10 wherein the average particle size is less thanabout 20 nanometers and the nanostructure has a short range crystallineorder of about 1 to about 50 nanometers.
 15. A nanostructured p/njunction solar cell comprising: an n-type oxide semiconductor layercomprising a support and a nanostructured metal oxide film disposed onat least one surface of the support, wherein the film predominantlycomprises a columnar morphology characterized as having continuousindividual columnar structures oriented approximately normal to thesupport wherein the columnar structures have an average width, w, and agrain size criterion, X_(s), and wherein w/10 is greater than X_(s), anp-type oxide semiconductor layer comprising a support and ananostructured metal oxide film disposed on at least one surface of thesupport, wherein the film predominantly comprises a columnar morphologycharacterized as having continuous individual columnar structuresoriented approximately normal to the support wherein the columnarstructures have an average width, w, and a grain size criterion, X_(s),and wherein w/10 is greater than X_(s), wherein the nanostructured p/njunction solar cell has a sunlight to electricity conversion of fromabout 10% to about 20%. 16-17. (canceled)
 18. The nanostructured p/njunction solar cell of claim 15 wherein the nanostructured metal oxidecomprises metal oxide particles having an average particle size of lessthan about 100 nanometers. 19-21. (canceled)
 22. The nanostructured p/njunction solar cell of claim 18 wherein the average particle size isless than about 20 nanometers and the nanostructure has a short rangecrystalline order of about 1 to about 50 nanometers.
 23. A process forthe preparation of a metal species-based nanostructured film in a flameaerosol reactor, the method comprising: introducing a vaporized metalprecursor stream; introducing a vaporized fuel stream; introducing avaporized oxidizer stream; combusting the metal precursor stream, thefuel stream and the oxidizer stream in a flame to form metalspecies-based nanoparticles in the flame region; depositing the metalspecies-based nanoparticles onto a support surface wherein thetemperature of the surface is controlled; and sintering the metalspecies-based nanoparticles to form the metal species-basednanostructured film. 24-25. (canceled)
 26. The process of claim 23wherein the flame temperature is from about 1500° C. to about 3500° C.27-32. (canceled)
 33. The process of claim 23 wherein the metalspecies-based nanoparticle comprises a zero valent metal.
 34. Theprocess of claim 23 wherein the nanostructure is of predominantly ofcolumnar morphology or predominantly of granular morphology.
 35. Theprocess of claim 23 wherein the metal species-based nanoparticles havean average particle size of less than about 100 nanometers. 36-38.(canceled)
 39. The process of claim 35 wherein the average particle sizeis less than about 20 nanometers and the nanostructure morphology ispredominantly columnar having a short range crystalline order of about 1to about 50 nanometers. 40-46. (canceled)
 47. A process for thepreparation of a metal species-based nanostructured film in a flameaerosol reactor, the method comprising: introducing a vaporized metalprecursor stream; introducing a vaporized fuel stream; combusting themetal precursor stream and the fuel stream in a flame to form in theflame region metal species-based nanoparticles comprising zero valentmetal; and depositing the metal species-based nanoparticles onto asupport surface wherein the temperature of the surface is controlled;and sintering the metal species-based nanoparticles to form the metalspecies-based nanostructured film. 48-49. (canceled)
 50. The process ofclaim 47 wherein the nanostructure is of predominantly of columnarmorphology or predominantly of granular morphology.
 51. The process ofclaim 47 wherein the metal species-based nanoparticles have an averageparticle size of less than about 100 nanometers. 52-54. (canceled) 55.The process of clam 47 wherein the nanostructure morphology ispredominantly columnar having a short range crystalline order of about 1to about 50 nanometers. 56-58. (canceled)